S01400 - SEMI S14 - Safety Guideline for Fire Risk Assessment and Miti

This Safety Guideline provides considerations to the manufacturers of semiconductor manufacturing equipment that will assist them in assessing and mitigating the risk to equipment and product associated with fire and combustion by-products.   Although this Safety Guideline is written in the form of an assessment tool, it is intended for use throughout the design and development of semiconductor manufacturing equipment.   This Safety Guideline may also be used by the users of such equipment and by other interested parties to assess and compare the described risks of various equipment designs or in the design and evaluation of ancillary equipment or modifications.   This Safety Guideline is not intended to specify which techniques (e.g., selection of materials or detection systems) are to be used to mitigate fire risk. These guidelines do, however, recommend that the traditional risk management hierarchy of elimination

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